Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark

Kostas S. Tsakalis; Jose Job Flores-Godoy; Armando A. Rodriguez

Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark

Kostas S. Tsakalis
, Jose Job Flores-Godoy
, Armando A. Rodriguez

Arizona State University

Research output: Contribution to conference › Paper › peer-review

17 Scopus citations

Abstract

This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.

Original language	English
Pages	508-513
Number of pages	6
State	Published - 1997
Externally published	Yes
Event	Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97 - Los Angeles, CA, USA Duration: 9 Sep 1997 → 12 Sep 1997

Conference

Conference	Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97
City	Los Angeles, CA, USA
Period	9/09/97 → 12/09/97

Cite this

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title = "Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark",

abstract = "This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.",

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year = "1997",

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Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark. / Tsakalis, Kostas S.; Flores-Godoy, Jose Job; Rodriguez, Armando A.
1997. 508-513 Paper presented at Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97, Los Angeles, CA, USA.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Hierarchical modeling and control for re-entrant semiconductor fabrication lines

T2 - Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97

AU - Tsakalis, Kostas S.

AU - Flores-Godoy, Jose Job

AU - Rodriguez, Armando A.

PY - 1997

Y1 - 1997

N2 - This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.

AB - This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.

UR - https://www.scopus.com/pages/publications/0030687001

M3 - Artículo

AN - SCOPUS:0030687001

SP - 508

EP - 513

Y2 - 9 September 1997 through 12 September 1997

ER -

Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark

Abstract

Conference

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