Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark

Kostas S. Tsakalis, Jose Job Flores-Godoy, Armando A. Rodriguez

Producción científica: Contribución a una conferenciaArtículorevisión exhaustiva

17 Citas (Scopus)

Resumen

This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.

Idioma originalInglés
Páginas508-513
Número de páginas6
EstadoPublicada - 1997
Publicado de forma externa
EventoProceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97 - Los Angeles, CA, USA
Duración: 9 set. 199712 set. 1997

Conferencia

ConferenciaProceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97
CiudadLos Angeles, CA, USA
Período9/09/9712/09/97

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