Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark

Kostas S. Tsakalis; Jose Job Flores-Godoy; Armando A. Rodriguez

Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark

Kostas S. Tsakalis, Jose Job Flores-Godoy, Armando A. Rodriguez

Arizona State University

Producción científica: Contribución a una conferencia › Artículo › revisión exhaustiva

17 Citas (Scopus)

Resumen

This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.

Idioma original	Inglés
Páginas	508-513
Número de páginas	6
Estado	Publicada - 1997
Publicado de forma externa	Sí
Evento	Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97 - Los Angeles, CA, USA Duración: 9 set. 1997 → 12 set. 1997

Conferencia

Conferencia	Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97
Ciudad	Los Angeles, CA, USA
Período	9/09/97 → 12/09/97

Otros archivos y enlaces

https://www.scopus.com/pages/publications/0030687001

Citar esto

@conference{bb4793d8c3974efe9477c97446818d50,

title = "Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark",

abstract = "This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.",

author = "Tsakalis, \{Kostas S.\} and Flores-Godoy, \{Jose Job\} and Rodriguez, \{Armando A.\}",

year = "1997",

language = "Ingl{\'e}s",

pages = "508--513",

note = "Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97 ; Conference date: 09-09-1997 Through 12-09-1997",

}

Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark. / Tsakalis, Kostas S.; Flores-Godoy, Jose Job; Rodriguez, Armando A.
1997. 508-513 Papel presentado en Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97, Los Angeles, CA, USA.

Producción científica: Contribución a una conferencia › Artículo › revisión exhaustiva

TY - CONF

T1 - Hierarchical modeling and control for re-entrant semiconductor fabrication lines

T2 - Proceedings of the 1997 IEEE 6th International Conference on Emerging Technologies and Factory Automation, ETFA'97

AU - Tsakalis, Kostas S.

AU - Flores-Godoy, Jose Job

AU - Rodriguez, Armando A.

PY - 1997

Y1 - 1997

N2 - This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.

AB - This paper addresses the problem of controlling re-entrant semiconductor fabrication lines. To focus the presentation, a virtual five-machine six-step mini-fab is used. This mini-fab - developed by Intel in collaboration with ASU - is intended to contain all of the features which make a real line difficult to control. Industry-like policies are discussed and compared with control-theoretic hierarchical policies.

UR - https://www.scopus.com/pages/publications/0030687001

M3 - Artículo

AN - SCOPUS:0030687001

SP - 508

EP - 513

Y2 - 9 September 1997 through 12 September 1997

ER -

Hierarchical modeling and control for re-entrant semiconductor fabrication lines: A mini-fab benchmark

Resumen

Conferencia

Otros archivos y enlaces

Huella

Citar esto